EKC Technology Promotes Michael Fury to Vice President, R&D and Engineering
EKC Technology, a ChemFirst Inc. (NYSE:CEM) company, has promoted Dr. Michael Fury to vice president, R&D and Engineering. In the position, he will be responsible for advanced post-etch residue removers, CMP slurries, and EKC's PMOD (Photochemical Metal-Organic Deposition) technology. The patented PMOD process, licensed from Simon Fraser University, uses light in combination with metallic compounds to directly deposit metal and metal oxides on a substrate. Prior to his promotion, Dr. Fury was director of Process Integration for Advanced Materials.
Before joining EKC Dr. Fury was the senior manager for CMP and Backgrind at Silterra, the Malaysian start-up foundry. Before Silterra, Dr. Fury worked at AlliedSignal, Rodel, Inc., Rippey Corp., and spent 16 years at IBM Corp. in East Fishkill, N.Y., working in advanced interconnect technology including CMP.
Dr. Fury received his B.S. in Chemistry from Iowa State University and a Ph.D. in Physical Chemistry from the University of Illinois at Urbana.
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