Air Products increaes NF3 capacity almost 50 percent to over 2,000 MT/year
Air Products announced that it has expanded its capacity of nitrogen trifluoride (NF3) by almost 50 percent to over 2,000 metric tons per year. The increased NF3 capacity, almost double the capacity of the number two NF3 supplier, results from Air Products' expansion of its electronics specialty gases production facility in Hometown, Pennsylvania. The additional NF3 capacity is now fully on-stream.
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.
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