Air Products increaes NF3 capacity almost 50 percent to over 2,000 MT/year
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.
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