Schott Lithotec underscores leadership position
At the same time, Schott Lithotec is also engaged in two EUVL (Extreme Ultra Violett Lithography) development projects. From 2006, EUVL is expected to gradually supplant today's optical exposure method for semiconductor chips. In the future, mirrors will replace lens systems as reflecting optical elements. Schott Lithotec is preparing for this technology change in close collaboration with the research center of the Schott Group and by participating in the German EUVL project, which is sponsored by the Federal Ministry for Research, and in the European EXTUMASK program. Both projects focus on the development of suitable EUVL materials and the necessary mask blanks.
Most read news
Other news from the department research and development
Get the chemical industry in your inbox
By submitting this form you agree that LUMITOS AG will send you the newsletter(s) selected above by email. Your data will not be passed on to third parties. Your data will be stored and processed in accordance with our data protection regulations. LUMITOS may contact you by email for the purpose of advertising or market and opinion surveys. You can revoke your consent at any time without giving reasons to LUMITOS AG, Ernst-Augustin-Str. 2, 12489 Berlin, Germany or by e-mail at revoke@lumitos.com with effect for the future. In addition, each email contains a link to unsubscribe from the corresponding newsletter.