Air Products to Build New NF3 Production Facility in Asia

Expansion to Serve Regional Demand Growth for Semiconductors and Flat Panel Displays

06-Oct-2006

Air Products will construct a nitrogen trifluoride (NF3) plant in Ulsan, Korea to support the fast growing Asian semiconductor and liquid crystal display (LCD) markets. The new production facility will be operated by Air Products Korea Electronics and will be constructed at the company's existing specialty gas site in Ulsan. The first phase of the new plant will produce in excess of 500 metric tons per year and will be completed in late 2007. Upon completion, Air Products' global NF3 capacity will be more than 2,500 metric tons per year.

This will be the company's second Electronic Specialty Material (ESM) investment at Ulsan after recently bringing on-stream an ultra-high purity ammonia plant in 2005. This facility complements other Korean ESM facilities in Shiwha, Banwol, Cheonan and Pyeongtaek.

NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.

"This new manufacturing facility is part of a multi-year investment strategy to build on our leading specialty materials position and enhance our ability to serve our semiconductor and TFT-LCD customers anywhere in the world," said Mike Hilton, vice president and general manager, Electronics and Performance Materials at Air Products.

In addition, Air Products bulk supply capabilities for NF3 will be further enhanced for the delivery of product to large volume flat panel and 300mm silicon semiconductor fabrication plants. Air Products is the largest and most experienced supplier of Bulk Specialty Gas Systems (BSGS) and ISO modules, which serve to safely and efficiently transport NF3 to locations throughout the world. The company currently has over 300 electronics BSGS and 300 total ISO modules in service. Air Products' latest BSGS innovation features pipelines that supply NF3 directly to multiple semiconductor and flat panel display fabs from a single location, allowing for further savings while improving safety, quality and reliability.

Air Products has safely manufactured and distributed NF3 for over a quarter century from its ESM manufacturing facility in Hometown, Pa. The company will continue to operate its three existing NF3 plants at that location ensuring reliable global NF3 supply through the operation of multiple independent plants that continue to be optimized. Air Products has built a solid global infrastructure to facilitate the movement of NF3 and other specialty products through strategically placed transfills in Taiwan, Korea, Japan and Belgium and distribution centers near customer locations.

https://www.chemeurope.com/en/news/58475/air-products-to-build-new-nf3-production-facility-in-asia.html