BOC Edwards Opens New Vacuum Pump Test Lab

23-Jan-2004

BOC Edwards announced the opening of a new vacuum equipment laboratory at its Clevedon, North Somerset (UK) site. Vacuum technologists at BOC Edwards can now test new pump designs under realistic semiconductor process conditions, taking advantage of the unique breadth of technologies within the company, from delivery of electronic gases to exhaust management. In addition, emerging process applications can be simulated, addressing future requirements of the semiconductor industry in the design of new vacuum pumps.

"By combining several of our research efforts under one roof, we maintain a unique edge in providing our customers with truly integrated process support solutions," said Dr. Raj Rajagopal. "We are committed to providing resources to develop solutions that will improve compatibility between gas, vacuum and abatement technologies."

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