Varian, Inc. unveils powerful pumping system for use in industrial thin film deposition systems

13-May-2003

Varian, Inc. introduced its new Turbo-V 2K-G, an application-specific turbomolecular pumping system dedicated for OEM and end users of thin film deposition equipment, today at the Society of vacuum Coaters Conference in San Francisco, Calif. This self-contained system incorporates on-board electronics and integrated vent/purge capability to offer customers a single high performance instrument, eliminating the need for an external power supply, additional wiring and reducing the amount of valuable control rack space. In addition to being a complete system, the Turbo-V 2K-G is one of the most compact pumps of its kind on the market, with a diameter of just 335 mm and measuring only 335 mm in height.

Turbo-V 2K-G is the next generation of Varian Inc.'s well-established line of turbomolecular vacuum pumps. It is characterized by high efficiency, compact size and durability to deliver consistently superior performance in industrial production environments. With its high throughput capacity for Argon gas, specifically at inlet pressures in the full 10^-3 mbar range, the Turbo-V 2K-G is ideally suited to vacuum coating applications including, glass coating, display coating, data storage coating, optical coating, and decorative thin-film surface treatments.

The Turbo-V 2K-G will be available for shipment in August 2003. Currently, a limited number of units are available by request for field trials and testing.

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