Air Liquide Announces SARIS(TM), a New Balazs(TM) Analytical Service for Solid Materials Characterization
Balazs(TM) analytical services, a division of Air Liquide America L.P.'s Electronics business unit, introduces SARIS(TM), a new analytical method for identification of trace- level impurities in solid semiconductor materials. Multi-elemental concentrations are obtained simultaneously, providing a very cost effective way to identify various sources of micro-contamination.
SARIS(TM), which stands for Solid Analysis by Rapid Ionization mass Spectrometry, is a complete sampling and analytical technique. Small quantities of solid material are removed, ionized and measured for elemental concentration by Inductively Coupled Plasma Mass Spectrometry (ICP-MS). SARIS(TM) can be applied to a wide range of materials such as solids, particles, films, refractory crystals, bulk materials, polymers and patterned wafers. More than 30 applications for semiconductor materials have been developed to date, including copper and new low-k dielectrics.
Results obtained using SARIS(TM) identify major constituents and trace- level concentrations in solid materials. Unlike existing techniques, SARIS(TM) minimizes interferences between impurities, thereby improving their identification. Sampling is done at atmospheric pressure in order to reduce the risk of losing critical impurities, which may happen in other analytical processes typically using a vacuum method.
SARIS(TM) results complement information obtained using existing analytical techniques, such as SEM-EDX (Scanning Electron Microscope-Energy Dispersive X-Ray), and are often superior to other traditional methods in terms of detection limits, quantitative information and cost.
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Topic World Mass Spectrometry
Mass spectrometry enables us to detect and identify molecules and reveal their structure. Whether in chemistry, biochemistry or forensics - mass spectrometry opens up unexpected insights into the composition of our world. Immerse yourself in the fascinating world of mass spectrometry!
Topic World Mass Spectrometry
Mass spectrometry enables us to detect and identify molecules and reveal their structure. Whether in chemistry, biochemistry or forensics - mass spectrometry opens up unexpected insights into the composition of our world. Immerse yourself in the fascinating world of mass spectrometry!