Air Liquide Announces SARIS(TM), a New Balazs(TM) Analytical Service for Solid Materials Characterization
SARIS(TM), which stands for Solid Analysis by Rapid Ionization mass Spectrometry, is a complete sampling and analytical technique. Small quantities of solid material are removed, ionized and measured for elemental concentration by Inductively Coupled Plasma Mass Spectrometry (ICP-MS). SARIS(TM) can be applied to a wide range of materials such as solids, particles, films, refractory crystals, bulk materials, polymers and patterned wafers. More than 30 applications for semiconductor materials have been developed to date, including copper and new low-k dielectrics.
Results obtained using SARIS(TM) identify major constituents and trace- level concentrations in solid materials. Unlike existing techniques, SARIS(TM) minimizes interferences between impurities, thereby improving their identification. Sampling is done at atmospheric pressure in order to reduce the risk of losing critical impurities, which may happen in other analytical processes typically using a vacuum method.
SARIS(TM) results complement information obtained using existing analytical techniques, such as SEM-EDX (Scanning Electron Microscope-Energy Dispersive X-Ray), and are often superior to other traditional methods in terms of detection limits, quantitative information and cost.
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