Ralph R. Dammel from Merck receives the Frits Zernike Award for Microlithography
Ralph Dammel has published over 200 scientific papers in chemistry, microlithography and over 90 patent families in the field. His book “Diazonaphthoquinone-based Resists” is used as the definitive textbook on this topic. Dammel had been with AZ Electronic Materials and its predecessors since 1986 in various technology functions, including Global R&D Director and Chief Technology Officer. Following Merck’s acquisition of AZ Electronic Materials in 2014, Dammel will assume the position of Head of Technology Office Chemicals US to continuously dedicate his expertise in the developing areas of lithography and novel emerging technologies.
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