Reducing production costs and environmental footprint for semiconductor industry

TNO and Solvay develop new process for high purity Phosphoric acid

04-May-2011 - Netherlands

Solvay and TNO have developed together a new process for the purification of phosphoric acid. Based on a novel and very precise crystallisation technology perfected by TNO, the TNO HWC®. This technology is especially suited to producing Phosphoric acid that meets the extremely stringent purity requirements of the semiconductor industry.

Solvay has an exclusive worldwide license on this TNO technology for the production of Phosphoric acid. A first semi-industrial plant based on TNO HWC® and commissioned some months ago in Bernburg (Germany), has already generated extremely promising results.

This high purity Phosphoric acid is primarily targeted at the electronics industry that makes semiconductors, flat panel displays as well as photovoltaic and light emitting electronic applications. Other uses for Phosphoric acid are in food and healthcare.

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