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Stanford Microsystems Laboratory




The Stanford Microsystems Lab is one of micro/nano-scale laboratories at Stanford University. It includes a wide range of projects including micromachined sensors for system monitoring and modeling, development of novel processes and devices for measuring nanoscale mechanical behavior, and the analysis, design, and control of integrated electro-mechanical systems. In the group there is a large focus on biomedical applications of nanofabricated devices with the goal of developing diagnostic tools, measurement and analysis systems, and reliable manufacture methods.

Current Projects

  • Piezoresistive floating-element based MEMS shear stress sensors
  • Cell force measurements
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