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Soft lithographyIn technology, soft lithography refers to a set of methods for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks" (in the words of Rogers and Nuzzo, p. 50, as cited in "References"). It is called "soft" because it uses elastomeric materials most notably PDMS. Soft lithography is generally used to construct features measured on the nanometer scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly during the period 1995 to 2005. Additional recommended knowledge
ProcedureSoft lithography includes the technologies of Micro Contact Printing (µCP), replica molding (REM), microtransfer molding (µTM), micromolding in capillaries (MIMIC) and solvent-assisted micromolding (SAMIM) (From Xia et al.) Patterning by etching at the nanoscale (PENs) One of the soft lithography procedures, Micro contact printing as discussed by Xia and Whitesides, is as follows:
AdvantagesSoft lithography has some unique advantages over other forms of lithography (such as photolithography and electron beam lithography). They include the following:
See alsoReferences
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This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Soft_lithography". A list of authors is available in Wikipedia. |