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Octodecaborane
Octadecaborane ions can be used for low energy ion implantation of boron in the manufacture of semiconductors; the molecule is ionized and transported more or less intact. Once the octadecaborane molecule has been implanted, it breaks apart. This is a method of reducing the effective energy of the implanted ion, without the difficulties of a low energy light ion beam. References
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This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Octodecaborane". A list of authors is available in Wikipedia. |