Hexafluoroacetylacetone

Hexafluoroacetylacetone is the chemical compound with the formula CF₃C(O)CH₂C(O)CF₃. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac^-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.

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This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.^[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.^[2]

References

1. ^ Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society 69: 1819-20.
2. ^ Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron 14: 699-732. doi:10.1016/0277-5387(94)00401-Y.