To use all functions of this page, please activate cookies in your browser.
my.chemeurope.com
With an accout for my.chemeurope.com you can always see everything at a glance – and you can configure your own website and individual newsletter.
- My watch list
- My saved searches
- My saved topics
- My newsletter
Borophosphosilicate glassBorophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses such as PSG and borophosphosilicate glass are commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers. Additional recommended knowledgeBPSG has been implicated in increasing a device's susceptibility to soft errors since the Boron-10 isotope is good at capturing thermal neutrons from cosmic radiation. It then undergoes fission producing a gamma ray, an alpha particle, and a lithium ion. These products may then dump charge into nearby structures, causing data loss (bit flipping, or single event upset). In critical designs, depleted boron consisting almost entirely of Boron-11 is used to avoid this effect as a radiation hardening measure. Boron-11 is a by-product of the nuclear industry. |
This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Borophosphosilicate_glass". A list of authors is available in Wikipedia. |